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Papernov S, Brunsman MD, Oliver JB, et al. Optical properties of oxygen vacancies in HfO. Opt Express. 2018;26(13):17608-17623doi: 10.1364/OE.26.017608.
Papernov, S., Brunsman, M. D., Oliver, J. B., Hoffman, B. N., Kozlov, A. A., Demos, S. G., Shvydky, A., Cavalcante, F. H. M., Yang, L., Menoni, C. S., Roshanzadeh, B., Boyd, S. T. P., Emmert, L. A., & Rudolph, W. (2018). Optical properties of oxygen vacancies in HfO. Optics express, 26(13), 17608-17623. https://doi.org/10.1364/OE.26.017608
Papernov, S, et al. "Optical properties of oxygen vacancies in HfO." Optics express vol. 26,13 (2018): 17608-17623. doi: https://doi.org/10.1364/OE.26.017608
Papernov S, Brunsman MD, Oliver JB, Hoffman BN, Kozlov AA, Demos SG, Shvydky A, Cavalcante FHM, Yang L, Menoni CS, Roshanzadeh B, Boyd STP, Emmert LA, Rudolph W. Optical properties of oxygen vacancies in HfO. Opt Express. 2018 Jun 25;26(13):17608-17623. doi: 10.1364/OE.26.017608. PMID: 30119572.
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Opt Express. 2018 Jun 25;26(13):17608-17623. doi: 10.1364/OE.26.017608.

Optical properties of oxygen vacancies in HfO.

Optics express

S Papernov, M D Brunsman, J B Oliver, B N Hoffman, A A Kozlov, S G Demos, A Shvydky, F H M Cavalcante, L Yang, C S Menoni, B Roshanzadeh, S T P Boyd, L A Emmert, W Rudolph

PMID: 30119572 DOI: 10.1364/OE.26.017608

Abstract

Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absorption spectroscopy, using nanoKelvin calorimetry, revealed an enhanced absorption in the near-ultraviolet (near-UV) and visible wavelength ranges for films with reduced oxygen content, which was attributed to mid-gap electronic states of oxygen vacancies. Absorption in the near-infrared was found to originate from structural defects other than oxygen vacancy. Luminescence generated by continuous-wave 355-nm laser excitation in e-beam films showed significant changes in the spectral profile with oxygen reduction and new band formation linked to oxygen vacancies. The luminescence from oxygen-vacancy states was found to have microsecond-scale lifetimes when compared with nanosecond-scale lifetimes of luminescence attributed to other structural film defects. Laser-damage testing using ultraviolet nanosecond and infrared femtosecond pulses showed a reduction of the damage threshold with increasing number of oxygen vacancies in hafnium oxide films.

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