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Kappa J, Sokoluk D, Klingel S, et al. Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz. Sci Rep. 2019;9(1):2597doi: 10.1038/s41598-019-39152-y.
Kappa, J., Sokoluk, D., Klingel, S., Shemelya, C., Oesterschulze, E., & Rahm, M. (2019). Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz. Scientific reports, 9(1), 2597. https://doi.org/10.1038/s41598-019-39152-y
Kappa, Jan, et al. "Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz." Scientific reports vol. 9,1 (2019): 2597. doi: https://doi.org/10.1038/s41598-019-39152-y
Kappa J, Sokoluk D, Klingel S, Shemelya C, Oesterschulze E, Rahm M. Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz. Sci Rep. 2019 Feb 22;9(1):2597. doi: 10.1038/s41598-019-39152-y. PMID: 30796342; PMCID: PMC6385255.
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Sci Rep. 2019 Feb 22;9(1):2597. doi: 10.1038/s41598-019-39152-y.

Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz.

Scientific reports

Jan Kappa, Dominik Sokoluk, Steffen Klingel, Corey Shemelya, Egbert Oesterschulze, Marco Rahm

Affiliations

  1. Department of Electrical and Computer Engineering, Research Center OPTIMAS, Technische Universität Kaiserslautern, Kaiserslautern, Germany. [email protected].
  2. Department of Electrical and Computer Engineering, Research Center OPTIMAS, Technische Universität Kaiserslautern, Kaiserslautern, Germany.
  3. Department of Experimental Physics, Physics and Technology of Nanostructures, Nano Structuring Center, Technische Universität Kaiserslautern, Kaiserslautern, Germany.

PMID: 30796342 PMCID: PMC6385255 DOI: 10.1038/s41598-019-39152-y

Abstract

We report the design, fabrication and experimental investigation of a spectrally wide-band terahertz spatial light modulator (THz-SLM) based on an array of 768 actuatable mirrors with each having a length of 220 μm and a width of 100 μm. A mirror length of several hundred micrometers is required to reduce diffraction from individual mirrors at terahertz frequencies and to increase the pixel-to-pixel modulation contrast of the THz-SLM. By means of spatially selective actuation, we used the mirror array as reconfigurable grating to spatially modulate terahertz waves in a frequency range from 0.97 THz to 2.28 THz. Over the entire frequency band, the modulation contrast was higher than 50% with a peak modulation contrast of 87% at 1.38 THz. For spatial light modulation, almost arbitrary spatial pixel sizes can be realized by grouping of mirrors that are collectively switched as a pixel. For fabrication of the actuatable mirrors, we exploited the intrinsic residual stress in chrome-copper-chrome multi-layers that forces the mirrors into an upstanding position at an inclination angle of 35°. By applying a bias voltage of 37 V, the mirrors were pulled down to the substrate. By hysteretic switching, we were able to spatially modulate terahertz radiation at arbitrary pixel modulation patterns.

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