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Sensors (Basel). 2019 Apr 12;19(8). doi: 10.3390/s19081750.

Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors.

Sensors (Basel, Switzerland)

Atsutaka Miyamichi, Atsushi Ono, Keiichiro Kagawa, Keita Yasutomi, Shoji Kawahito

Affiliations

  1. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. [email protected].
  2. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. [email protected].
  3. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan. [email protected].
  4. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. [email protected].
  5. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan. [email protected].
  6. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. [email protected].
  7. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan. [email protected].
  8. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan. [email protected].
  9. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan. [email protected].

PMID: 31013721 PMCID: PMC6515349 DOI: 10.3390/s19081750

Abstract

We demonstrate the multiband color filtering of a standard RGB color and a complementary CMY color by a plasmonic color filter, composed of concentric corrugated metallic thin film rings. The surface plasmon resonance is excited by the periodic corrugation, and the coupled light is transmitted through the central subwavelength aperture. Color selectivity is achieved not only in the visible but also in the near-infrared (NIR) region. Therefore, simultaneous imaging with visible and NIR can be realized by the integration of plasmonic color filters with sensors. We investigate the angle of incidence dependence of the transmission color selectivity and the color purity of the fabricated plasmonic color filter array.

Keywords: color filter; image sensors; metallic thin film; multiband; surface plasmon

References

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