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Nuwayhid RB, Jarry A, Rubloff GW, et al. Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor. ACS Appl Mater Interfaces. 2020;12(19):21641-21650doi: 10.1021/acsami.0c03578.
Nuwayhid, R. B., Jarry, A., Rubloff, G. W., & Gregorczyk, K. E. (2020). Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor. ACS applied materials & interfaces, 12(19), 21641-21650. https://doi.org/10.1021/acsami.0c03578
Nuwayhid, R Blake, et al. "Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor." ACS applied materials & interfaces vol. 12,19 (2020): 21641-21650. doi: https://doi.org/10.1021/acsami.0c03578
Nuwayhid RB, Jarry A, Rubloff GW, Gregorczyk KE. Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor. ACS Appl Mater Interfaces. 2020 May 13;12(19):21641-21650. doi: 10.1021/acsami.0c03578. Epub 2020 May 01. PMID: 32315520.
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ACS Appl Mater Interfaces. 2020 May 13;12(19):21641-21650. doi: 10.1021/acsami.0c03578. Epub 2020 May 01.

Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor.

ACS applied materials & interfaces

R Blake Nuwayhid, Angelique Jarry, Gary W Rubloff, Keith E Gregorczyk

Affiliations

  1. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States.
  2. Institute for Systems Research and the Institute for Research in Electronics and Applied Physics, University of Maryland, Collage Park, Maryland 20742, United States.

PMID: 32315520 DOI: 10.1021/acsami.0c03578

Abstract

The development of novel materials that are compatible with nanostructured architectures is required to meet the demands of next-generation energy-storage technologies. Atomic layer deposition (ALD) allows for the precise synthesis of new materials that can conformally coat complex 3D structures. In this work, we demonstrate a thermal ALD process for sodium phosphorus oxynitride (NaPON), a thin-film solid-state electrolyte (SSE), for sodium-ion batteries (SIBs). NaPON is analogous to the commonly used lithium phosphorus oxynitride SSE in lithium-ion batteries. The ALD process produces a conformal film with a stoichiometry of Na

Keywords: atomic layer deposition; energy storage; sodium-ion batteries; sodium-ion conductors; solid-state batteries; solid-state electrolytes; solid-state sodium-ion batteries; thin-film batteries; thin-film electrolytes

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