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Spampinato V, Dialameh M, Franquet A, et al. A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices. Anal Chem. 2020;92(16):11413-11419doi: 10.1021/acs.analchem.0c02406.
Spampinato, V., Dialameh, M., Franquet, A., Fleischmann, C., Conard, T., van der Heide, P., & Vandervorst, W. (2020). A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices. Analytical chemistry, 92(16), 11413-11419. https://doi.org/10.1021/acs.analchem.0c02406
Spampinato, Valentina, et al. "A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices." Analytical chemistry vol. 92,16 (2020): 11413-11419. doi: https://doi.org/10.1021/acs.analchem.0c02406
Spampinato V, Dialameh M, Franquet A, Fleischmann C, Conard T, van der Heide P, Vandervorst W. A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices. Anal Chem. 2020 Aug 18;92(16):11413-11419. doi: 10.1021/acs.analchem.0c02406. Epub 2020 Aug 06. PMID: 32664722.
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Anal Chem. 2020 Aug 18;92(16):11413-11419. doi: 10.1021/acs.analchem.0c02406. Epub 2020 Aug 06.

A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices.

Analytical chemistry

Valentina Spampinato, Masoud Dialameh, Alexis Franquet, Claudia Fleischmann, Thierry Conard, Paul van der Heide, Wilfried Vandervorst

Affiliations

  1. IMEC, Kapeldreef 75, 3001 Leuven, Belgium.
  2. INRIM, Strada delle Cacce 91, 10135 Turin, Italy.
  3. Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium.

PMID: 32664722 DOI: 10.1021/acs.analchem.0c02406

Abstract

With the continuous miniaturization and increasing complexity of the devices used in nanotechnology, there is a pressing need for characterization techniques with nm-scale 3D-spatial resolution. Unfortunately, techniques like Secondary Ion Mass Spectrometry (SIMS) fail to reach the required lateral resolution. For this reason, new concepts and approaches, including the combination of different complementary techniques, have been developed in over the past years to try to overcome some of the challenges. Beyond the problem of spatial resolution in a 3D SIMS experiment, one is also faced with the impact of changes in topography during the analysis. These are quite difficult to identify because they originate from the different sputter rates of the various materials and or phases in a heterogeneous system and are notorious at the interfaces between organic and inorganic layers. As each of these materials will erode at a different velocity, accurate 3D-analysis will require means to establish a spatially resolved relation between ion bombardment time and depth. Inevitably such a nonhomogeneous erosion will lead to the development of surface topography. The impact of these effects can be overcome provided one can capture the time and spatially dependent surface erosion (velocity) with high spatial resolution during the course of a profiling experiment. Incorporating a Scanning Probe Microscope (SPM) unit which provides topography measurements with high spatial resolution, into a SIMS tool (e.g., Time of Flight (ToF) SIMS) with means to alternate between SPM and SIMS measurements, is one approach to meet that demand for complementary topographical information allowing accurate 3D chemical imaging. In this paper, the result of integrating a SPM module into a ToF-SIMS system is presented illustrating the improvements in 3D data accuracy which can be obtained when analyzing complex 3D-systems.

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