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Niu Z, Ding M, Jiang J, et al. Jones pupil decomposition and its lithographic imaging impacts. Appl Opt. 2021;60(5):1357-1365doi: 10.1364/AO.414144.
Niu, Z., Ding, M., Jiang, J., Shang, H., Zhu, S., Zhang, F., Shi, W., Zeng, A., & Huang, H. (2021). Jones pupil decomposition and its lithographic imaging impacts. Applied optics, 60(5), 1357-1365. https://doi.org/10.1364/AO.414144
Niu, Zhiyuan, et al. "Jones pupil decomposition and its lithographic imaging impacts." Applied optics vol. 60,5 (2021): 1357-1365. doi: https://doi.org/10.1364/AO.414144
Niu Z, Ding M, Jiang J, Shang H, Zhu S, Zhang F, Shi W, Zeng A, Huang H. Jones pupil decomposition and its lithographic imaging impacts. Appl Opt. 2021 Feb 10;60(5):1357-1365. doi: 10.1364/AO.414144. PMID: 33690579.
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