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Lyubomirskiy M, Schurink B, Makhotkin IA, et al. Planar refractive lenses made of SiC for high intensity nanofocusing. Opt Express. 2021;29(9):14025-14032doi: 10.1364/OE.416223.
Lyubomirskiy, M., Schurink, B., Makhotkin, I. A., Brueckner, D., Wittwer, F., Kahnt, M., Seyrich, M., Seiboth, F., Bijkerk, F., & Schroer, C. G. (2021). Planar refractive lenses made of SiC for high intensity nanofocusing. Optics express, 29(9), 14025-14032. https://doi.org/10.1364/OE.416223
Lyubomirskiy, Mikhail, et al. "Planar refractive lenses made of SiC for high intensity nanofocusing." Optics express vol. 29,9 (2021): 14025-14032. doi: https://doi.org/10.1364/OE.416223
Lyubomirskiy M, Schurink B, Makhotkin IA, Brueckner D, Wittwer F, Kahnt M, Seyrich M, Seiboth F, Bijkerk F, Schroer CG. Planar refractive lenses made of SiC for high intensity nanofocusing. Opt Express. 2021 Apr 26;29(9):14025-14032. doi: 10.1364/OE.416223. PMID: 33985128.
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Opt Express. 2021 Apr 26;29(9):14025-14032. doi: 10.1364/OE.416223.

Planar refractive lenses made of SiC for high intensity nanofocusing.

Optics express

Mikhail Lyubomirskiy, Bart Schurink, Igor A Makhotkin, Dennis Brueckner, Felix Wittwer, Maik Kahnt, Martin Seyrich, Frank Seiboth, Fred Bijkerk, Christian G Schroer

PMID: 33985128 DOI: 10.1364/OE.416223

Abstract

We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.

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