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Smith, B. W., et al. "Photolithographic laboratory instruction at Rochester Institute of Technology." Proceedings., Eighth University/Government/Industry Microelectronics Symposium. IEEE, 1989.
Smith B. W. et al. Photolithographic laboratory instruction at Rochester Institute of Technology //Proceedings., Eighth University/Government/Industry Microelectronics Symposium. – IEEE, 1989. – С. 123-127.
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BW Smith, KH Hesler, LF Fuller… - Proceedings., Eighth …, 1989 - ieeexplore.ieee.org

Photolithographic laboratory instruction at Rochester Institute of Technology.

laboratory instruction

Smith

GSID: jtGGLMwq4uYJ

Excerpt

… All steps in the photolithographic process are addressed at RIT in hands on laboratory … Microlithography I1 laboratory introduces the students to some advanced state of the art … Students gain further experience on the GCA 48OODSW stepper in a laboratory devoted to …

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