A Kumar, HL Chan… - ROMOPTO'97: Fifth …, 1998 - spiedigitallibrary.org

Synthesis, characterization, and mechanical properties of carbides and nitrides films prepared by pulsed-laser-deposition method.

EPSCoR Research Infrastructure Improvement Program AND Program Evaluation

Kumar

GSID: d_b3sxRjQSkJ

Excerpt

Carbides and nitrides of metal have a large number of applications in modern technology owing to their interesting, and in some ways unique, physical and chemical properties. Thin film coatings of titanium carbide and aluminum nitride were deposited on Si (100) substrates using pulsed laser deposition method. The structural and microstructural properties of these films have been characterized using x-ray diffraction, and Fourier transform infrared spectroscopic techniques. The mechanical properties of the films were evaluated to …

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