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Wu Y, Giddings AD, Verheijen MA, et al. Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. Chem Mater. 2018;30(4):1209-1217doi: 10.1021/acs.chemmater.7b03501.
Wu, Y., Giddings, A. D., Verheijen, M. A., Macco, B., Prosa, T. J., Larson, D. J., Roozeboom, F., & Kessels, W. M. M. (2018). Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. Chemistry of materials : a publication of the American Chemical Society, 30(4), 1209-1217. https://doi.org/10.1021/acs.chemmater.7b03501
Wu, Yizhi, et al. "Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography." Chemistry of materials : a publication of the American Chemical Society vol. 30,4 (2018): 1209-1217. doi: https://doi.org/10.1021/acs.chemmater.7b03501
Wu Y, Giddings AD, Verheijen MA, Macco B, Prosa TJ, Larson DJ, Roozeboom F, Kessels WMM. Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. Chem Mater. 2018 Feb 27;30(4):1209-1217. doi: 10.1021/acs.chemmater.7b03501. Epub 2018 Feb 05. PMID: 29515290; PMCID: PMC5833938.
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