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Kambham AK, Mody J, Gilbert M, et al. Atom-probe for FinFET dopant characterization. Ultramicroscopy. 2011;111(6):535-9doi: 10.1016/j.ultramic.2011.01.017.
Kambham, A. K., Mody, J., Gilbert, M., Koelling, S., & Vandervorst, W. (2011). Atom-probe for FinFET dopant characterization. Ultramicroscopy, 111(6), 535-9. https://doi.org/10.1016/j.ultramic.2011.01.017
Kambham, A K, et al. "Atom-probe for FinFET dopant characterization." Ultramicroscopy vol. 111,6 (2011): 535-9. doi: https://doi.org/10.1016/j.ultramic.2011.01.017
Kambham AK, Mody J, Gilbert M, Koelling S, Vandervorst W. Atom-probe for FinFET dopant characterization. Ultramicroscopy. 2011 May;111(6):535-9. doi: 10.1016/j.ultramic.2011.01.017. Epub 2011 Jan 18. PMID: 21288644.
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