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Tomita K, Sato Y, Tsukiyama S, et al. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources. Sci Rep. 2017;7(1):12328doi: 10.1038/s41598-017-11685-0.
Tomita, K., Sato, Y., Tsukiyama, S., Eguchi, T., Uchino, K., Kouge, K., Tomuro, H., Yanagida, T., Wada, Y., Kunishima, M., Soumagne, G., Kodama, T., Mizoguchi, H., Sunahara, A., & Nishihara, K. (2017). Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources. Scientific reports, 7(1), 12328. https://doi.org/10.1038/s41598-017-11685-0
Tomita, Kentaro, et al. "Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources." Scientific reports vol. 7,1 (2017): 12328. doi: https://doi.org/10.1038/s41598-017-11685-0
Tomita K, Sato Y, Tsukiyama S, Eguchi T, Uchino K, Kouge K, Tomuro H, Yanagida T, Wada Y, Kunishima M, Soumagne G, Kodama T, Mizoguchi H, Sunahara A, Nishihara K. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources. Sci Rep. 2017 Oct 02;7(1):12328. doi: 10.1038/s41598-017-11685-0. PMID: 28970565; PMCID: PMC5624956.
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