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Showing 1 to 6 of 6 entries
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PZT transduction of high-overtone contour-mode resonators.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Chandrahalim H, Bhave SA, Polcawich RG, Pulskamp JS, Kaul R.
PMID: 20875993
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Sep;57(9):2035-41. doi: 10.1109/TUFFC.2010.1651.

This paper presents the Butterworth-van Dyke model and quantitative comparison that explore the design space of lead zirconate titanate-only (PZT) and PZT on 3-, 5-, and 10-μm single-crystal silicon (SCS) high-overtone width-extensional mode (WEM) resonators with identical lateral dimensions...

A General Analytical Formulation for the Motional Parameters of Piezoelectric MEMS Resonators.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Puder JM, Pulskamp JS, Rudy RQ, Polcawich RG, Bhave SA.
PMID: 29505414
IEEE Trans Ultrason Ferroelectr Freq Control. 2018 Mar;65(3):476-488. doi: 10.1109/TUFFC.2018.2793099.

This paper reports on a general analytical expression for the motional resistance ( ) of an arbitrary mode in a piezoelectric microelectromechanical system resonator with parallel plate electrode geometry. After applying simplifying assumptions and using analytical modes shapes, expressions...

Rapid Harmonic Analysis of Piezoelectric MEMS Resonators.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Puder JM, Pulskamp JS, Rudy RQ, Cassella C, Rinaldi M, Chen G, Bhave SA, Polcawich RG.
PMID: 29856715
IEEE Trans Ultrason Ferroelectr Freq Control. 2018 Jun;65(6):979-990. doi: 10.1109/TUFFC.2018.2822119.

This paper reports on a novel simulation method combining the speed of analytical evaluation with the accuracy of finite-element analysis (FEA). This method is known as the rapid analytical-FEA technique (RAFT). The ability of the RAFT to accurately predict...

Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Pulskamp JS, Bedair SS, Polcawich RG, Smith GL, Martin J, Power B, Bhave SA.
PMID: 22622990
IEEE Trans Ultrason Ferroelectr Freq Control. 2012 May;59(5):1043-60. doi: 10.1109/TUFFC.2012.2290.

This paper reports theoretical analysis and experimental results on a numerical electrode shaping design technique that permits the excitation of arbitrary modes in arbitrary geometries for piezoelectric resonators, for those modes permitted to exist by the nonzero piezoelectric coefficients...

Velocity-dependent fatigue crack paths in nanograined Pt films.

Physical review letters

Meirom RA, Clark T, Polcawich R, Pulskamp J, Dubey M, Muhlstein CL.
PMID: 18764634
Phys Rev Lett. 2008 Aug 22;101(8):085503. doi: 10.1103/PhysRevLett.101.085503. Epub 2008 Aug 19.

Studies of crack growth in nanograined films assert that mechanical damage accumulates at grain boundaries irrespective of the crack velocity and loading conditions. This work shows that crack advance in nanograined Pt films involves a dislocation-slip mechanism that is...

Large displacement vertical translational actuator based on piezoelectric thin films.

Journal of micromechanics and microengineering : structures, devices, and systems

Qiu Z, Pulskamp JS, Lin X, Rhee CH, Wang T, Polcawich RG, Oldham K.
PMID: 25506130
J Micromech Microeng. 2010 Jul;20(7). doi: 10.1088/0960-1317/20/7/075016.

A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT)...

Showing 1 to 6 of 6 entries