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Walter P, Dippel AC, Pflaum K, et al. A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines. Rev Sci Instrum. 2015;86(5):053906doi: 10.1063/1.4918620.
Walter, P., Dippel, A. C., Pflaum, K., Wernecke, J., van den Hurk, J., Blume, J., & Klemradt, U. (2015). A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines. The Review of scientific instruments, 86(5), 053906. https://doi.org/10.1063/1.4918620
Walter, P, et al. "A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines." The Review of scientific instruments vol. 86,5 (2015): 053906. doi: https://doi.org/10.1063/1.4918620
Walter P, Dippel AC, Pflaum K, Wernecke J, van den Hurk J, Blume J, Klemradt U. A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines. Rev Sci Instrum. 2015 May;86(5):053906. doi: 10.1063/1.4918620. PMID: 26026535.
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