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Koch JA, Presta RW, Sacks RA, et al. Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications. Appl Opt. 2000;39(25):4540-6doi: 10.1364/ao.39.004540.
Koch, J. A., Presta, R. W., Sacks, R. A., Zacharias, R. A., Bliss, E. S., Dailey, M. J., Feldman, M., Grey, A. A., Holdener, F. R., Salmon, J. T., Seppala, L. G., Toeppen, J. S., Van Atta, L., Van Wonterghem, B. M., Whistler, W. T., Winters, S. E., & Woods, B. W. (2000). Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications. Applied optics, 39(25), 4540-6. https://doi.org/10.1364/ao.39.004540
Koch, J A, et al. "Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications." Applied optics vol. 39,25 (2000): 4540-6. doi: https://doi.org/10.1364/ao.39.004540
Koch JA, Presta RW, Sacks RA, Zacharias RA, Bliss ES, Dailey MJ, Feldman M, Grey AA, Holdener FR, Salmon JT, Seppala LG, Toeppen JS, Van Atta L, Van Wonterghem BM, Whistler WT, Winters SE, Woods BW. Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications. Appl Opt. 2000 Sep 01;39(25):4540-6. doi: 10.1364/ao.39.004540. PMID: 18350042.
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