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Park S, Clark BL, Keszler DA, et al. Low-temperature thin-film deposition and crystallization. Science. 2002;297(5578):65doi: 10.1126/science.1072009.
Park, S., Clark, B. L., Keszler, D. A., Bender, J. P., Wager, J. F., Reynolds, T. A., & Herman, G. S. (2002). Low-temperature thin-film deposition and crystallization. Science (New York, N.Y.), 297(5578), 65. https://doi.org/10.1126/science.1072009
Park, Sangmoon, et al. "Low-temperature thin-film deposition and crystallization." Science (New York, N.Y.) vol. 297,5578 (2002): 65. doi: https://doi.org/10.1126/science.1072009
Park S, Clark BL, Keszler DA, Bender JP, Wager JF, Reynolds TA, Herman GS. Low-temperature thin-film deposition and crystallization. Science. 2002 Jul 05;297(5578):65. doi: 10.1126/science.1072009. PMID: 12098690.
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Science. 2002 Jul 05;297(5578):65. doi: 10.1126/science.1072009.

Low-temperature thin-film deposition and crystallization.

Science (New York, N.Y.)

Sangmoon Park, Benjamin L Clark, Douglas A Keszler, Jeffrey P Bender, John F Wager, Thomas A Reynolds, Gregory S Herman

Affiliations

  1. Department of Chemistry, Oregon State University, 153 Gilbert Hall, Corvallis, OR 97331-4003, USA.

PMID: 12098690 DOI: 10.1126/science.1072009

[No abstract available.]

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