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Wirtz T, Fleming Y, Gerard M, et al. Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis. Rev Sci Instrum. 2012;83(6):063702doi: 10.1063/1.4724308.
Wirtz, T., Fleming, Y., Gerard, M., Gysin, U., Glatzel, T., Meyer, E., Wegmann, U., Maier, U., Odriozola, A. H., & Uehli, D. (2012). Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis. The Review of scientific instruments, 83(6), 063702. https://doi.org/10.1063/1.4724308
Wirtz, Tom, et al. "Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis." The Review of scientific instruments vol. 83,6 (2012): 063702. doi: https://doi.org/10.1063/1.4724308
Wirtz T, Fleming Y, Gerard M, Gysin U, Glatzel T, Meyer E, Wegmann U, Maier U, Odriozola AH, Uehli D. Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis. Rev Sci Instrum. 2012 Jun;83(6):063702. doi: 10.1063/1.4724308. PMID: 22755629.
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Rev Sci Instrum. 2012 Jun;83(6):063702. doi: 10.1063/1.4724308.

Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis.

The Review of scientific instruments

Tom Wirtz, Yves Fleming, Mathieu Gerard, Urs Gysin, Thilo Glatzel, Ernst Meyer, Urs Wegmann, Urs Maier, Aitziber Herrero Odriozola, Daniel Uehli

Affiliations

  1. Department Science and Analysis of Materials (SAM), Centre de Recherche Public, Gabriel Lippmann, 41 rue du Brill, L-4422 Belvaux, Luxembourg. [email protected]

PMID: 22755629 DOI: 10.1063/1.4724308

Abstract

State-of-the-art secondary ion mass spectrometry (SIMS) instruments allow producing 3D chemical mappings with excellent sensitivity and spatial resolution. Several important artifacts however arise from the fact that SIMS 3D mapping does not take into account the surface topography of the sample. In order to correct these artifacts, we have integrated a specially developed scanning probe microscopy (SPM) system into a commercial Cameca NanoSIMS 50 instrument. This new SPM module, which was designed as a DN200CF flange-mounted bolt-on accessory, includes a new high-precision sample stage, a scanner with a range of 100 μm in x and y direction, and a dedicated SPM head which can be operated in the atomic force microscopy (AFM) and Kelvin probe force microscopy modes. Topographical information gained from AFM measurements taken before, during, and after SIMS analysis as well as the SIMS data are automatically compiled into an accurate 3D reconstruction using the software program "SARINA," which was developed for this first combined SIMS-SPM instrument. The achievable lateral resolutions are 6 nm in the SPM mode and 45 nm in the SIMS mode. Elemental 3D images obtained with our integrated SIMS-SPM instrument on Al/Cu and polystyrene/poly(methyl methacrylate) samples demonstrate the advantages of the combined SIMS-SPM approach.

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