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Nanotechnology. 2016 Aug 05;27(31):31LT02. doi: 10.1088/0957-4484/27/31/31LT02. Epub 2016 Jun 21.

Near-theoretical fracture strengths in native and oxidized silicon nanowires.

Nanotechnology

Frank W DelRio, Ryan M White, Sergiy Krylyuk, Albert V Davydov, Lawrence H Friedman, Robert F Cook

Affiliations

  1. Material Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO 80305, USA.

PMID: 27325151 DOI: 10.1088/0957-4484/27/31/31LT02

Abstract

In this letter, fracture strengths σ f of native and oxidized silicon nanowires (SiNWs) were determined via atomic force microscopy bending experiments and nonlinear finite element analysis. In the native SiNWs, σ f in the Si was comparable to the theoretical strength of Si〈111〉, ≈22 GPa. In the oxidized SiNWs, σ f in the SiO2 was comparable to the theoretical strength of SiO2, ≈6 to 12 GPa. The results indicate a change in the failure mechanism between native SiNWs, in which fracture originated via inter-atomic bond breaking or atomic-scale defects in the Si, and oxidized SiNWs, in which fracture initiated from surface roughness or nano-scale defects in the SiO2.

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