Display options
Cite
Wan C, Gaylord TK, Bakir MS. RCWA-EIS method for interlayer grating coupling. Appl Opt. 2016;55(22):5900-8doi: 10.1364/AO.55.005900.
Wan, C., Gaylord, T. K., & Bakir, M. S. (2016). RCWA-EIS method for interlayer grating coupling. Applied optics, 55(22), 5900-8. https://doi.org/10.1364/AO.55.005900
Wan, Congshan, et al. "RCWA-EIS method for interlayer grating coupling." Applied optics vol. 55,22 (2016): 5900-8. doi: https://doi.org/10.1364/AO.55.005900
Wan C, Gaylord TK, Bakir MS. RCWA-EIS method for interlayer grating coupling. Appl Opt. 2016 Aug 01;55(22):5900-8. doi: 10.1364/AO.55.005900. PMID: 27505369.
Copy Download .nbib Format: NLM
Share it on

Appl Opt. 2016 Aug 01;55(22):5900-8. doi: 10.1364/AO.55.005900.

RCWA-EIS method for interlayer grating coupling.

Applied optics

Congshan Wan, Thomas K Gaylord, Muhannad S Bakir

PMID: 27505369 DOI: 10.1364/AO.55.005900

Abstract

The grating coupling efficiencies for interlayer connection (overlaid chips) were previously calculated using the new rigorous coupled-wave analysis equivalent-index-slab (RCWA-EIS) method. The chip-to-chip coupling efficiencies were determined for rectangular-groove (binary) gratings. In the present work, the search algorithms used in the RCWA-EIS method are optimized giving rise to improved definition of equivalent indices. Further, the versatility of the RCWA-EIS method is demonstrated by extending it to (nonbinary) parallelogramic gratings, sawtooth gratings, and volume gratings. The finite-difference time-domain method is used to verify the results. This demonstrates the flexibility of the RCWA-EIS method in analyzing arbitrary 1D gratings.

Publication Types