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Wu H, Guan B, Sun Y, et al. Controlled doping by self-assembled dendrimer-like macromolecules. Sci Rep. 2017;7:41299doi: 10.1038/srep41299.
Wu, H., Guan, B., Sun, Y., Zhu, Y., & Dan, Y. (2017). Controlled doping by self-assembled dendrimer-like macromolecules. Scientific reports, 741299. https://doi.org/10.1038/srep41299
Wu, Haigang, et al. "Controlled doping by self-assembled dendrimer-like macromolecules." Scientific reports vol. 7 (2017): 41299. doi: https://doi.org/10.1038/srep41299
Wu H, Guan B, Sun Y, Zhu Y, Dan Y. Controlled doping by self-assembled dendrimer-like macromolecules. Sci Rep. 2017 Feb 01;7:41299. doi: 10.1038/srep41299. PMID: 28145485; PMCID: PMC5286916.
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Sci Rep. 2017 Feb 01;7:41299. doi: 10.1038/srep41299.

Controlled doping by self-assembled dendrimer-like macromolecules.

Scientific reports

Haigang Wu, Bin Guan, Yingri Sun, Yiping Zhu, Yaping Dan

Affiliations

  1. School of Biomedical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China.
  2. University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, 200240, China.
  3. Key Laboratory of Polar Materials and Devices, Ministry of Education, and Department of Electronic Engineering, East China Normal University, Shanghai 200241, China.

PMID: 28145485 PMCID: PMC5286916 DOI: 10.1038/srep41299

Abstract

Doping via self-assembled macromolecules might offer a solution for developing single atom electronics by precisely placing individual dopants at arbitrary location to meet the requirement for circuit design. Here we synthesize dendrimer-like polyglycerol macromolecules with each carrying one phosphorus atom in the core. The macromolecules are immobilized by the coupling reagent onto silicon surfaces that are pre-modified with a monolayer of undecylenic acid. Nuclear magnetic resonance (NMR) and X-ray photoelectron spectroscopy (XPS) are employed to characterize the synthesized macromolecules and the modified silicon surfaces, respectively. After rapid thermal annealing, the phosphorus atoms carried by the macromolecules diffuse into the silicon substrate, forming dopants at a concentration of 10

Conflict of interest statement

The authors declare no competing financial interests.

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