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ACS Nano. 2018 Apr 24;12(4):4045-4054. doi: 10.1021/acsnano.8b01805. Epub 2018 Apr 16.

Flexible Ferroelectric Sensors with Ultrahigh Pressure Sensitivity and Linear Response over Exceptionally Broad Pressure Range.

ACS nano

Youngoh Lee, Jonghwa Park, Soowon Cho, Young-Eun Shin, Hochan Lee, Jinyoung Kim, Jinyoung Myoung, Seungse Cho, Saewon Kang, Chunggi Baig, Hyunhyub Ko

Affiliations

  1. Department of Energy and Chemical Engineering , Ulsan National Institute of Science and Technology (UNIST) , Ulsan Metropolitan City , 689-798 , Republic of Korea.

PMID: 29648803 DOI: 10.1021/acsnano.8b01805

Abstract

Flexible pressure sensors with a high sensitivity over a broad linear range can simplify wearable sensing systems without additional signal processing for the linear output, enabling device miniaturization and low power consumption. Here, we demonstrate a flexible ferroelectric sensor with ultrahigh pressure sensitivity and linear response over an exceptionally broad pressure range based on the material and structural design of ferroelectric composites with a multilayer interlocked microdome geometry. Due to the stress concentration between interlocked microdome arrays and increased contact area in the multilayer design, the flexible ferroelectric sensors could perceive static/dynamic pressure with high sensitivity (47.7 kPa

Keywords: electronic skin; high sensitivity; large dynamic pressure range; linear sensing; tactile sensor

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