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Tan KW, Werner JG, Goodman MD, et al. Synthesis and Formation Mechanism of All-Organic Block Copolymer-Directed Templating of Laser-Induced Crystalline Silicon Nanostructures. ACS Appl Mater Interfaces. 2018;10(49):42777-42785doi: 10.1021/acsami.8b12706.
Tan, K. W., Werner, J. G., Goodman, M. D., Kim, H. S., Jung, B., Sai, H., Braun, P. V., Thompson, M. O., & Wiesner, U. (2018). Synthesis and Formation Mechanism of All-Organic Block Copolymer-Directed Templating of Laser-Induced Crystalline Silicon Nanostructures. ACS applied materials & interfaces, 10(49), 42777-42785. https://doi.org/10.1021/acsami.8b12706
Tan, Kwan Wee, et al. "Synthesis and Formation Mechanism of All-Organic Block Copolymer-Directed Templating of Laser-Induced Crystalline Silicon Nanostructures." ACS applied materials & interfaces vol. 10,49 (2018): 42777-42785. doi: https://doi.org/10.1021/acsami.8b12706
Tan KW, Werner JG, Goodman MD, Kim HS, Jung B, Sai H, Braun PV, Thompson MO, Wiesner U. Synthesis and Formation Mechanism of All-Organic Block Copolymer-Directed Templating of Laser-Induced Crystalline Silicon Nanostructures. ACS Appl Mater Interfaces. 2018 Dec 12;10(49):42777-42785. doi: 10.1021/acsami.8b12706. Epub 2018 Dec 03. PMID: 30444112.
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ACS Appl Mater Interfaces. 2018 Dec 12;10(49):42777-42785. doi: 10.1021/acsami.8b12706. Epub 2018 Dec 03.

Synthesis and Formation Mechanism of All-Organic Block Copolymer-Directed Templating of Laser-Induced Crystalline Silicon Nanostructures.

ACS applied materials & interfaces

Kwan Wee Tan, Jörg G Werner, Matthew D Goodman, Ha Seong Kim, Byungki Jung, Hiroaki Sai, Paul V Braun, Michael O Thompson, Ulrich Wiesner

Affiliations

  1. Department of Materials Science and Engineering , Cornell University , Ithaca , New York 14853 , United States.
  2. School of Materials Science and Engineering , Nanyang Technological University , Singapore 639798 , Singapore.
  3. Department of Materials Science and Engineering, Beckman Institute for Advanced Science and Technology , University of Illinois at Urbana-Champaign , Urbana , Illinois 61801 , United States.

PMID: 30444112 DOI: 10.1021/acsami.8b12706

Abstract

This report describes the generation of three-dimensional (3D) crystalline silicon continuous network nanostructures by coupling all-organic block copolymer self-assembly-directed resin templates with low-temperature silicon chemical vapor deposition and pulsed excimer laser annealing. Organic 3D mesoporous continuous-network resin templates were synthesized from the all-organic self-assembly of an ABC triblock terpolymer and resorcinol-formaldehyde resols. Nanosecond pulsed excimer laser irradiation induced the transient melt transformation of amorphous silicon precursors backfilled in the organic template into complementary 3D mesoporous crystalline silicon nanostructures with high pattern fidelity. Mechanistic studies on laser-induced crystalline silicon nanostructure formation revealed that the resin template was carbonized during transient laser-induced heating on the milli- to nanosecond timescales, thereby imparting enhanced thermal and structural stability to support the silicon melt-crystallization process at temperatures above 1250 °C. Photoablation of the resin material under pulsed excimer laser irradiation was mitigated by depositing an amorphous silicon overlayer on the resin template. This approach represents a potential pathway from organic block copolymer self-assembly to alternative functional hard materials with well-ordered 3D morphologies for potential hybrid photovoltaics, photonic, and energy storage applications.

Keywords: 3D silicon nanostructure; block copolymers; laser heating; self-assembly; templating

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