Display options
Share it on

Nano Lett. 2019 Jun 12;19(6):3830-3837. doi: 10.1021/acs.nanolett.9b00984. Epub 2019 May 13.

Ion Write Microthermotics: Programing Thermal Metamaterials at the Microscale.

Nano letters

Hwan Sung Choe, Radhika Prabhakar, Geoff Wehmeyer, Frances I Allen, Woochul Lee, Lei Jin, Ying Li, Peidong Yang, Cheng-Wei Qiu, Chris Dames, Mary Scott, Andrew Minor, Je-Hyeong Bahk, Junqiao Wu

Affiliations

  1. Department of Materials Science and Engineering , University of California , Berkeley , California 94720 , United States.
  2. Materials Sciences Division , Lawrence Berkeley National Laboratory , Berkeley , California 94720 , United States.
  3. Department of Electrical Engineering and Computer Science , University of Cincinnati , Cincinnati , Ohio 45221 , United States.
  4. Department of Mechanical Engineering , University of California , Berkeley , California 94720 , United States.
  5. Department of Chemistry , University of California , Berkeley , California 94720 , United States.
  6. Department of Electrical and Computer Engineering , National University of Singapore , Singapore , 117583.
  7. The Molecular Foundry , Lawrence Berkeley National Laboratory , Berkeley , California 94720 , United States.

PMID: 31059272 DOI: 10.1021/acs.nanolett.9b00984

Abstract

Considerable advances in manipulating heat flow in solids have been made through the innovation of artificial thermal structures such as thermal diodes, camouflages, and cloaks. Such thermal devices can be readily constructed only at the macroscale by mechanically assembling different materials with distinct values of thermal conductivity. Here, we extend these concepts to the microscale by demonstrating a monolithic material structure on which nearly arbitrary microscale thermal metamaterial patterns can be written and programmed. It is based on a single, suspended silicon membrane whose thermal conductivity is locally, continuously, and reversibly engineered over a wide range (between 2 and 65 W/m·K) and with fine spatial resolution (10-100 nm) by focused ion irradiation. Our thermal cloak demonstration shows how ion-write microthermotics can be used as a lithography-free platform to create thermal metamaterials that control heat flow at the microscale.

Keywords: Thermal metamaterial; ion irradiation; thermal cloak; thermal conductivity; thermotics

Publication Types