Cite
Luber E, Mohammadi R, Ophus C, et al. Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. Nanotechnology. 2008;19(12):125705doi: 10.1088/0957-4484/19/12/125705.
Luber, E., Mohammadi, R., Ophus, C., Lee, Z., Nelson-Fitzpatrick, N., Westra, K., Evoy, S., Dahmen, U., Radmilovic, V., & Mitlin, D. (2008). Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. Nanotechnology, 19(12), 125705. https://doi.org/10.1088/0957-4484/19/12/125705
Luber, E, et al. "Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications." Nanotechnology vol. 19,12 (2008): 125705. doi: https://doi.org/10.1088/0957-4484/19/12/125705
Luber E, Mohammadi R, Ophus C, Lee Z, Nelson-Fitzpatrick N, Westra K, Evoy S, Dahmen U, Radmilovic V, Mitlin D. Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications. Nanotechnology. 2008 Mar 26;19(12):125705. doi: 10.1088/0957-4484/19/12/125705. Epub 2008 Feb 21. PMID: 21817746.
Copy
Download .nbib